Optimal surface cleaning of GaAs (001) with atomic hydrogen

• 1 March 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (2) , 547-550
• https://doi.org/10.1116/1.587388

Abstract

Keywords

• GAAS
• ATOMIC HYDROGEN
• OPTIMAL SURFACE CLEANING