An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film
- 31 August 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 50 (1-2) , 75-80
- https://doi.org/10.1016/0924-4247(96)80087-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal MethodJapanese Journal of Applied Physics, 1991
- Acoustic lenses employing PZT thin film transducersMaterials Science and Engineering: A, 1989
- Harmonic electrostatic motorsSensors and Actuators, 1989
- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- An ultrasonic motor using bending vibrations of a short cylinderIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989