The influence of ion bombardment on reactions between Ti and gaseous N2

• 1 March 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 8  (2) , 861-867
• https://doi.org/10.1116/1.576931

Abstract

Keywords

• NITROGEN
• ION BOMBARDMENT
• FUNCTION
• DIFFERENTIAL
• BEHAVIOR
• MODELED
• STUDY WERE USED