Effects of Hydrogen and Temperature on the Kinetics of the Fluidized‐Bed Nitridation of Silicon
- 1 January 1994
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 77 (1) , 186-192
- https://doi.org/10.1111/j.1151-2916.1994.tb06975.x
Abstract
No abstract availableKeywords
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