Y2O3, ZrO2 and Stabilized ZrO2 Films Prepared by Chemical Vapor Deposition

• 1 January 1982
• journal article
• Published by Ceramic Society of Japan in Journal of the Ceramic Association, Japan
• Vol. 90  (1037) , 54-55
• https://doi.org/10.2109/jcersj1950.90.54

Abstract