In-the-lens secondary electron analyser for IC internal voltage measurements with electron beams

10 May 1984

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 20 (10) , 408-409
https://doi.org/10.1049/el:19840282

Abstract

A new analyser scheme for voltage measurements on integrated circuits is described. The analyser is built into the objective lens of a scanning electron microscope. It features small working distances, high voltage resolution capability, high transmission, and reduced sensitivity to measurement errors.

Keywords

MEASUREMENT ERRORS
HIGH VOLTAGE RESOLUTION CAPABILITY
IC INTERNAL VOLTAGE MEASUREMENTS
IN THE LENS ANALYSER
SCANNING ELECTRON MICROSCOPE
OBJECTIVE LENS
INTEGRATED CIRCUITS
ELECTRON PROBE
SECONDARY ELECTRON ANALYSER
ELECTRON BEAMS

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