A novel non-contact sensor for surface topography measurement using a fibre optic principle
- 31 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3) , 68-74
- https://doi.org/10.1016/0924-4247(92)80082-e
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Modern measurement techniques in surface metrology: part I; stylus instruments, electron microscopy and non-optical comparatorsWear, 1988
- An electro-optical sensor for microdisplacement measurement and controlJournal of Physics E: Scientific Instruments, 1984