Ultrasonic flexural Lamb-wave actuators based on PZT thin film
- 1 January 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 64 (1) , 41-49
- https://doi.org/10.1016/s0924-4247(98)80056-3
Abstract
No abstract availableKeywords
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- Integrated-circuit-compatible design and technology of acoustic-wave-based microsensorsSensors and Actuators A: Physical, 1994
- Microtransport induced by ultrasonic Lamb wavesApplied Physics Letters, 1991