Experience in fabricating semiconductor devices using ion implantation techniques
- 31 December 1965
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 38, 178-179
- https://doi.org/10.1016/0029-554x(65)90129-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Range of Heavy Ions in SolidsPhysical Review B, 1962