Preparation of thin-film YBaCuO quantum interference devices with a lift-off technique

Abstract
Highly textured and polycrystalline YBaCuO thin films were sputtered on cold MgO single‐crystal substrates. After annealing in oxygen for 1 h at 920 °C, the films show critical temperatures Tc,end up to 74.5 K. Superconducting quantum interference devices (dc SQUID’s) structured in ≊1‐μm‐thick polycrystalline films with a lift‐off technique exhibit a critical current of 2 mA at 5.5 K and 35 μA at 72 K. Voltage modulation can be observed at temperatures up to 63 K.

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