Voltage measurement in the scanning electron microscope
- 1 September 1968
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 1 (9) , 902-906
- https://doi.org/10.1088/0022-3735/1/9/302
Abstract
Voltages have been measured in the scanning electron microscope by passing the secondary electrons through an electrostatic energy analyser between the specimen and the electron detector. Experimental results are described in which (i) some sources of image contrast are investigated and (ii) the reverse characteristic of a p-into-n diffused device is measured by a contactless method.Keywords
This publication has 15 references indexed in Scilit:
- Analysis of Materials by Electron-Excited Auger ElectronsJournal of Applied Physics, 1968
- Comparison of the Spherical Deflector and the Cylindrical Mirror AnalyzersReview of Scientific Instruments, 1968
- Electron beam induced potential contrast on unbiased planar transistorsSolid-State Electronics, 1967
- Erratum: Electron Gun using Long-Life Lanthanum Hexaboride CathodeJournal of Applied Physics, 1967
- Electron Gun using Long-Life Lanthanum Hexaboride CathodeJournal of Applied Physics, 1967
- Scanning Electron Microscopes: Is High Resolution Possible?Science, 1966
- Electron beam scanning technique for measuring surface work function variationsSurface Science, 1966
- Evaluation of Passivated Integrated Circuits Using the Scanning Electron MicroscopeJournal of the Electrochemical Society, 1964
- Angular Aberrations in Sector Shaped Electromagnetic Lenses for Focusing Beams of Charged ParticlesPhysical Review B, 1953
- Microanalysis by Means of ElectronsJournal of Applied Physics, 1944