Polymerization of para‐xylylene derivatives (parylene polymerization). I. Deposition kinetics for parylene N and parylene C
- 1 February 1984
- journal article
- research article
- Published by Wiley in Journal of Polymer Science: Polymer Chemistry Edition
- Vol. 22 (2) , 475-491
- https://doi.org/10.1002/pol.1984.170220218
Abstract
No abstract availableKeywords
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