Superresolution structure for optical data storage by near-field optics
- 13 October 1998
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 282-286
- https://doi.org/10.1117/12.326835
Abstract
A new proposal for near-field data storage and the basic experiment under a high speed disk rotation are described. Using the thermally nonlinear property of an Antimony thin film and an intermediate layer of SiN with a thickness of 20 nm, less than 100 nm sized marks were recorded and retrieved in an optical phase change film beyond the diffraction limit, with a wavelength of 680nm and a lens NA of 0.6.Keywords
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