Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives
- 1 August 2002
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 41 (Part 2, No) , L899-L901
- https://doi.org/10.1143/jjap.41.l899
Abstract
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