Diagnostic of arc discharges for plasma nitriding by optical emission spectroscopy
- 31 January 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 98 (1-3) , 1400-1405
- https://doi.org/10.1016/s0257-8972(97)00398-8
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
- Determination of N and O Atom Density in Ar-N2-H2 and Ar-O2-H2 Flowing Microwave Post DischargesJournal de Physique III, 1996
- Study of the ion energy distribution during physical vapour deposition of TiNSurface and Coatings Technology, 1994
- Optimization of nitrogen implantation of austenitic 316L steel by microstructural analysisMaterials Letters, 1994
- Emission spectroscopy of the plasma in the cathode region of N2-H2abnormal glow discharges for steel surface nitridingJournal of Physics D: Applied Physics, 1993
- Surface modification of pure titanium and Ti6A14V by intensified plasma ion nitridingThin Solid Films, 1992
- Properties of sputtered stainless steel-nitrogen coatings and structural analogy with low temperature plasma nitrided layers of austenitic steelsMaterials Science and Engineering: A, 1991
- Active species in microwave postdischarge for steel-surface nitridingIEEE Transactions on Plasma Science, 1990
- Emission spectroscopy study of N2-H2glow discharge for metal surface nitridingJournal of Physics D: Applied Physics, 1984
- A new low pressure plasma nitriding methodThin Solid Films, 1982
- A drift chamber study of the reaction ArH++H2 →H+3 + Ar and related reactionsThe Journal of Chemical Physics, 1981