Modeling of electron elastic and inelastic scattering

• 1 November 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (6) , 3864-3869
• https://doi.org/10.1116/1.588683

Abstract

Keywords

• ELECTRON BEAM LITHOGRAPHY
• CROSS SECTION
• THREE DIMENSIONAL
• ELASTIC SCATTERING
• PROXIMITY EFFECT
• SCHOTTKY BARRIER
• THIN FILM
• MONTE CARLO SIMULATION
• SCHOTTKY DIODE
• INELASTIC SCATTERING
• MONTE CARLO METHOD