Use of Fourier transfoim in grazing X-rays reflectometry
- 1 September 1994
- journal article
- Published by EDP Sciences in Journal de Physique III
- Vol. 4 (9) , 1523-1531
- https://doi.org/10.1051/jp3:1994219
Abstract
Grazing X-ray reflectometry allows the analysis of thin layer stacks. The fitting of the reflectivity curve by a trial and error method can be used in order to determine the parameters of the films. Fourier analysis of the experimental reflectivity can directly give a rough determination of the profil index. Application to real examples shows the validity of the methodKeywords
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