Summary Abstract: Photodeposition of metal films with ultraviolet laser light

• 1 March 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 20  (3) , 738-739
• https://doi.org/10.1116/1.571444

Abstract

Keywords

• SUMMARY ABSTRACT
• PHOTODEPOSITION
• LASER LIGHT
• ULTRAVIOLET LASER
• METAL FILMS