Mems microrelays
- 1 August 1998
- journal article
- Published by Elsevier in Mechatronics
- Vol. 8 (5) , 535-547
- https://doi.org/10.1016/s0957-4158(98)00021-x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga ProcessPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Electromagnetic Linear Actuators With Inductive Position Sensing For Micro Relay, Micro Valve And Precision Positioning ApplicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Contact materials for microrelaysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- In-package active fiber optic micro-alignerPublished by SPIE-Intl Soc Optical Eng ,1998
- Thin film shape memory alloy microactuatorsJournal of Microelectromechanical Systems, 1996
- Electromagnetic microrelays: Concepts and fundamental characteristicsSensors and Actuators A: Physical, 1994