Techniques for ellipsometric measurement of the thickness and optical constants of thin absorbing films
- 1 October 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 234 (1-2) , 443-446
- https://doi.org/10.1016/0040-6090(93)90303-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Examination of thin SiO2 films on Si using spectroscopic polarization modulation ellipsometryJournal of Applied Physics, 1991
- Modeling AlxGa1−xAs optical constants as functions of compositionJournal of Applied Physics, 1990