Piezoelectrically operated actuators by quartz micromachining for optical application
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A monolithic quartz actuator fabricated by anisotropic etching and operated by means of piezoelectric effect at resonant frequency is reported. Quartz actuators with large displacement had not previously been developed, because quartz has small piezoelectric constants compared to materials such as PZT. However, the authors have demonstrated a mechanism that provides displacements of up to 200 mu m with a millimeter-size suspended actuator using the piezoelectricity of quartz. As examples, bellows-type actuators and optical choppers have been fabricated and their mechanical characteristics measured. It has been shown that the bellows-type actuator can displace a small object statically by hitting it repeatedly. This woodpecker motion can be applied to move a small optical component such as a mirror and prism to switch the path of light.<>Keywords
This publication has 7 references indexed in Scilit:
- A comparison between micromachined pressure sensors using quartz or silicon vibrating beamsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Polysilicon micro vibromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- Micromachining of quartz and its application to an acceleration sensorSensors and Actuators A: Physical, 1990
- Design of a solid-state gyroscopic sensor made of quartzSensors and Actuators A: Physical, 1990
- A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm supportPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design DevicesTransactions of the Society of Instrument and Control Engineers, 1987
- Silicon as a mechanical materialProceedings of the IEEE, 1982