Auger electron emission from Si excited by ion bombardment with He+, Ne+, Ar+, and Xe+ are reported for ion energies in the range of 1 to 3 keV. The data supports the view that symmetric collisions between Si atoms in the sample are responsible for the observed Auger emission. The relative strength of atomiclike L 2,3 M M and bulk L 2,3 V V Auger features in the measured spectra were independent of both ion species and ion energy employed in this study.