Microfabricated optical chopper
- 15 December 1993
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1992, 40-46
- https://doi.org/10.1117/12.165705
Abstract
A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electro-statically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable defection amplitudes of 400 micrometers . Further optimizations of the design are discussed.Keywords
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