Thin film formation via vapor phase processing

• 4 April 1991
• book chapter
• Published by Cambridge University Press (CUP)
• p. 171-228
• https://doi.org/10.1017/cbo9780511623158.006

Abstract

Keywords

• VACANCY
• SURFACE RECONSTRUCTION
• EMBRYOS
• STRESS
• CONDENSED MATTER PHYSICS
• MATERIALS SCIENCE
• CHEMICAL VAPOR DEPOSITION
• LANGMUIR ISOTHERM
• RECONSTRUCTION
• ENTROPY OF MIXING
• NUCLEATION
• ADSORPTION
• DEPOSITION
• CHEMISORPTION
• PHASE RULE
• EPITAXIAL GROWTH
• STICKING COEFFICIENT
• ADSORPTION ISOTHERM
• SURFACE DIFFUSION