Implantation enhanced interdiffusion in GaAs/GaAlAs quantum structures

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 2034-2038
• https://doi.org/10.1116/1.584643

Abstract

Keywords

• GAAS/GAALAS QUANTUM
• QUANTUM STRUCTURES
• IMPLANTATION ENHANCED INTERDIFFUSION