Properties of irregular boundary of RF sputtered glass film for light guide

1 June 1972

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE

Vol. 60 (6) , 744-745
https://doi.org/10.1109/PROC.1972.8753

Abstract

The correlation lengths and the average deviation of the irregular boundary of glass film prepared by the RF sputtering were estimated by comparing the measured directivity of the scattered light with the calculated one. Both of the longitudinal and the transverse correlation lengths were 0.2-1µm and the average amplitude was about 70 Å.

Keywords

RADIO FREQUENCY
GLASS
LIGHT SCATTERING
OPTICAL SCATTERING
DIELECTRIC LOSSES
OPTICAL FILMS
SLABS
SPUTTERING
REFRACTIVE INDEX
OPTICAL PROPAGATION