Surface Reactions Leading to Contamination of Metal Films Photochemically Deposited from the Hexacarbonyls
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
A systematic study of the origin of contaminants in metal films photochemically deposited from the group VI hexacarbonyls is described. Background gas present in the cell during deposition, exposure to air and incomplctc removal of CO groups from the surface of the growing film all affect C and O incorporation. The data are compared to results of recent experiments examining surface photoproducts of the metal carbonyls.Keywords
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