In situ study of the hydrogen rich overlayer at the a-Si:H surface by infrared ellipsometry

This publication has 6 references indexed in Scilit:

• In situ study of the Si-H bond in a-Si:H ultrathin films
  Physica B: Condensed Matter, 1991
• Characteristic quantities of a cascade arc used as a light source for spectroscopic techniques
  Measurement Science and Technology, 1990
• Real-time detection of higher hydrides on the growing surface of hydrogenated amorphous silicon by infrared reflection absorption spectroscopy
  Applied Physics Letters, 1990
• Infrared relfectance spectroscopy of very thin films of a-SiH
  Journal of Non-Crystalline Solids, 1989
• Argon sputtering analysis of the growing surface of hydrogenated amorphous silicon films
  Journal of Applied Physics, 1988
• I n s i t u investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon films
  Journal of Applied Physics, 1987