Influence of the bonding conditions on the response of capacitive pressure sensors
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 121-124
- https://doi.org/10.1016/0924-4247(94)00873-g
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Low-cost high-sensitivity integrated pressure and temperature sensorSensors and Actuators A: Physical, 1994
- CAD tools in mechanical sensor designSensors and Actuators, 1989
- Capabilities and limits of silicon pressure sensorsSensors and Actuators, 1989
- Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragmRevue de Physique Appliquée, 1987
- Solid-state capacitive pressure transducersSensors and Actuators, 1986
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979