An industrial and applied review of new MEMS devices features
Top Cited Papers
- 1 May 2007
- journal article
- review article
- Published by Elsevier in Microelectronic Engineering
- Vol. 84 (5-8) , 1341-1344
- https://doi.org/10.1016/j.mee.2007.01.232
Abstract
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This publication has 1 reference indexed in Scilit:
- Frequency-selective MEMS for miniaturized low-power communication devicesIEEE Transactions on Microwave Theory and Techniques, 1999