A New Partial Pressure Gauge for He and D2 Using Ion Backscattering Principle
- 1 May 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (5A) , L403
- https://doi.org/10.1143/jjap.25.l403
Abstract
A new vacuum gauge which is capable of measuring partial pressures of He and D2 gases in their mixture was constructed. This gauge is operated with ion backscattering principle on a solid surface. The validity of the gauge for the partial pressure measurement is demonstrated experimentally and discussed.Keywords
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