Automated and calibrated whole wafer etch pit density measurements in GaAs

This publication has 6 references indexed in Scilit:

• A simple technique to evaluate the density of overlapping etch pits in GaAs
  Materials Letters, 1986
• Distributions of residual stress, dislocations, and EL2 in Czochralski-grown semi-insulating GaAs
  Journal of Applied Physics, 1986
• GaAs field-effect transistor properties, as influenced by the local concentrations of midgap native donors and dislocations
  Applied Physics Letters, 1985
• Substrate effects on the threshold voltage of GaAs field-effect transistors
  Applied Physics Letters, 1984
• Direct observation of dislocation effects on threshold voltage of a GaAs field-effect transistor
  Applied Physics Letters, 1983
• Symmetrical contours of deep level EL2 in liquid encapsulated Czochralski GaAs
  Applied Physics Letters, 1983