Quantitative analysis of light elements (nitrogen, carbon, and oxygen) in sputtered tantalum films by Auger electron spectroscopy and secondary ion mass spectrometry (SIMS)
- 1 February 1974
- journal article
- Published by American Chemical Society (ACS) in Analytical Chemistry
- Vol. 46 (2) , 189-196
- https://doi.org/10.1021/ac60338a026
Abstract
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