Abstract
Co84Zr5.5Nb10.5 and Co79Zr10Mo9Ni2 amorphous films were multilayered by sputtering with SiO2 as intermediate films. An inductor for high frequency application was fabricated with those films and Ni-Zn ferrite yoke. In order to improve the high frequency characteristics, stripe patterned films were studied. The films were annealed in a magnetic field and the frequency dependence of the multilayered films was measured in the frequency range 0.01∼200 MHz. The striped films showed better frequency characteristics than the unstriped films. An inductor made of striped films with a total thickness of 20μm and ferrite yokes exhibited an inductance of over 10μH at 1 MHz with frequency characteristics improved over those of Ni-Zn ferrite alone.

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