An Electrostatic Voltage Sensor Using Surface Acoustic Waves
- 1 January 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (S3)
- https://doi.org/10.7567/jjaps.20s3.197
Abstract
A compact electrostatic voltage sensor has been developed using a delay line type SAW oscillator. An additional collecting electrode is settled on a surface of a piezoelectric substrate between input and output interdigital transducers. The electrostatic voltage applied to the collecting electrode is detected by a frequency change of the SAW oscillator. Piezoelectric ceramics with d=-42×10-12 C/N are used for making the SAW oscillator. The sensitivity achieved is 0.64 Hz/V at oscillation frequency of 23 MHz.Keywords
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