Status report on the camd project
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 379-383
- https://doi.org/10.1016/0168-583x(89)91003-3
Abstract
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This publication has 1 reference indexed in Scilit:
- X-Ray Lithography: Can It Be JustifiedPublished by SPIE-Intl Soc Optical Eng ,1985