Non-uniform heating effects during treatment in a glow discharge
- 1 January 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 156 (2) , 337-344
- https://doi.org/10.1016/0040-6090(88)90328-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Heating effects in ionization-assisted processesThin Solid Films, 1984
- A predictive model for specimen heating during ion platingVacuum, 1982