Experimental Investigation of the Gas Phase in a Chemical Vapor Deposition Reaction: Application to the Silane‐Ammonia Reaction Leading to Silicon Nitride Deposits
- 1 March 1978
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 125 (3) , 487-492
- https://doi.org/10.1149/1.2131479
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: