Temperature control in a rapid thermal processor
- 1 January 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 39 (1) , 201-203
- https://doi.org/10.1109/16.108231
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Generalized predictive control—Part I. The basic algorithmAutomatica, 1987
- Theory and applications of adaptive control—A surveyAutomatica, 1983