An interpretation of quantitative analysis of Arthur and LePore for AlxGa1–xAs using AES

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Abstract
A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. This approach has described experimental results by Arthur and LePore for AlxGa1–xAs with considerable success. The theoretical calculation has indicated that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of AlxGa1–xAs changes from x = 0 to 1 and this leads to the linearity observed by Arthur and LePore.