Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits

Abstract
To demonstrate the feasibility of integrating polymer electro-optic devices on Si circuitry, we have vertically integrated a demonstration slab phase modulator on nonplanar VLSI circuitry. Optical loss measurements for waveguides fabricated on planarized circuits demonstrate that more practical devices like channel phase and Mach-Zehnder amplitude modulators can easily be integrated onto the circuits.