Reaction During the Sputtering of Metals onto Polyimide

• 9 November 1990
• book chapter
• Published by American Chemical Society (ACS)
• p. 272-287
• https://doi.org/10.1021/bk-1990-0440.ch020

Abstract

Keywords

• INTERFACE
• POLYIMIDE AND METAL
• STRUCTURE
• SPUTTER
• PEAKS
• DEPOSITED
• REACTION
• USED