Ion implantation and secondary ion mass spectrometry of compound semiconductors

• 1 August 1996
• journal article
• review article
• Published by Elsevier in Solid-State Electronics
• Vol. 39  (8) , 1113-1125
• https://doi.org/10.1016/0038-1101(95)00423-8

Abstract

Keywords

• SEMICONDUCTORS
• IMPLANTATION
• STRUCTURES
• COMPOUND
• ION MASS SPECTROMETRY
• III
• SECONDARY ION