Strain effects in SAW devices

1 May 1976

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE

Vol. 64 (5) , 613-615
https://doi.org/10.1109/proc.1976.10184

Abstract

An analytical model is developed to determine the velocity of surface acoustic waves in strained media. It is shown that, in addition to the variations in path length, the SAW propagation may depend significantly on the velocity change with strain.

Keywords

CAPACITIVE SENSORS
SURFACE ACOUSTIC WAVE DEVICES
STRESS
SURFACE ACOUSTIC WAVES
SUBSTRATES
ACOUSTIC WAVES
ACOUSTIC PROPAGATION
PROPAGATION DELAY
EQUATIONS
PHASE CHANGE MATERIALS

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