Thickness measurement of photoresist on water by surface measuring instrument.

• 1 January 1989
• journal article
• Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan
• Vol. 40  (2) , 241-247
• https://doi.org/10.4139/sfj.40.241

Abstract

Keywords

• THICKNESS MEASUREMENT
• WATER BY SURFACE
• MEASUREMENT OF PHOTORESIST
• PHOTORESIST ON WATER
• SURFACE MEASURING INSTRUMENT