The University of North Texas Ion Beam Modification and Analysis Laboratory
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 709-713
- https://doi.org/10.1016/0168-583x(89)90460-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Accelerator mass spectrometry solutions to semiconductor problemsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Ion bombardment and implantationReports on Progress in Physics, 1969