Self-excited Force Sensing Microcantilevers With Piezoelectric Thin Films For Dynamic Scanning Force Microscopy
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 632-635
- https://doi.org/10.1109/sensor.1995.717309
Abstract
This paper attempts to describe a new type of self-excited force sensing microcantilever for dynamic scanning force microscopy (SFM). The new microcantilevers have two piezoelectric ZnO layers on a SiO/sub 2/ film. The upper piezoelectric layer can be utilized for exciting the lever and detecting the lever displacement, and the lower layer for controlling the tip-sample spacing. We have the fabricated experimental two-layer piezoelectric microcantilevers and characterized them by measuring the frequency dependence of the admittance. Using the microcantilevers, a dynamic SFM with the resolution of less than 0.3 nm at a bandwidth of 125 Hz has been successfully constructed without the external oscillatorand detector.Keywords
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