Composition of amorphous (Si,Ge):H films from nuclear elastic scattering of 12 MeV protons

15 March 1985

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 46 (6) , 552-554
https://doi.org/10.1063/1.95535

Abstract

Nuclear elastic scattering of 12 MeV protons was employed for the first time to study the composition of thin films of hydrogenated amorphous Si-Ge alloys. The concentrations of H, Si, and Ge were measured simultaneously. The detection limit is about 25 ppm for a 10-min run. Free-standing films or films on a flat substrate with a total thickness of up to 20 μm can be analyzed.

Keywords

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