A polysilicon-diaphragm-based pressure sensor technology

• 1 December 1987
• journal article
• Published by IOP Publishing in Journal of Physics E: Scientific Instruments
• Vol. 20  (12) , 1469-1471
• https://doi.org/10.1088/0022-3735/20/12/007

Abstract

Keywords

• POLYSILICON DIAPHRAGM
• DIAPHRAGM BASED
• BASED PRESSURE SENSOR
• PRESSURE SENSOR TECHNOLOGY