Thermal Oxidation of Silicon after Ion Implantation

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (11) , 1603-1605
• https://doi.org/10.1149/1.2403313

Abstract

Keywords

• ION IMPLANTATION
• THERMAL OXIDATION OF SILICON
• SILICON AFTER ION